Vacuum
Evaporators, Vacuum Deposition Systems
TFS
Technologies, Inc. - 800-795-7977
Prices represent rebuilt
vacuum evaporators.
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to Contents-
Varian
Evaporators - Diffusion Pumped
| Stk.# |
Description |
Photo |
Price |
| E000 |
VARIAN
3117 Evaporator - with the following equipment:
18" by 30" pyrex bell jar with guard, electric hoist,
20" stainless baseplate, VHS-6, 2400 l/s diffusion pump,
362-6 LN2 trap, 6" ASA alum manual gate valve, manual
foreline and rough valves, Alcatel 2033, 27 cfm direct
drive rough pump, 2 filament sources, 2KVA SCR controlled
filament supply, source shutter, Inficon thickness monitor
with head, 843 ion gauge with dual TC's, quartz substrate
heater with control, simple substrate holder. |
 |
$16,500.00 |
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| Option 1 |
Change
to pneumatic valving with auto-valve sequencer |
Add |
$1200.00 |
| Option 2 |
Change
to water-cooled stainless bell jar if available |
Add |
$1.5 to 2.5k |
| Option 3 |
Install
domed planetary fixturing |
Add |
$3500.00 |
Varian
Evaporators - Cryo Pumped
| Stk.# |
Description |
Photo |
Price |
| E002 |
VARIAN
3117 Evaporator - with the following equipment:
18" by 30" pyrex bell jar with guard, electric hoist,
20" stainless baseplate, CTI CT-8 cryopump, SC air or
water-cooled compressor, 6" ASA pneumatic gate valve,
pneumatic foreline and rough valves, Alcatel 2033, 27 cfm
d/d rough pump, 2 filament sources, 2KVA SCR controlled
filament supply,source shutter, Inficon thickness monitor
with head, 843 ion gauge with dual TC's, quartz substrate
heater with control, simple substrate holder, auto-valve
sequencer with cryo regen control, cryo temp monitor. |
|
$26,500.00 |
| |
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| |
| |
| |
| Option 1 |
Change
to water-cooled stainless bell jar if available |
Add |
$1.5 to 2.5k |
| Option 2 |
Install
domed planetary fixturing |
Add |
$3500.00 |
| Option 3 |
Convert
to onboard cryo with remote keypad |
Add |
$2000.00 |
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to Contents-
Veeco Evaporators
| Stk.# |
Description |
Photo |
Price |
| E005 |
VEECO
VE-7700 - with the following equipment:
18" by 30" pyrex bell jar with guard, electric hoist,
20" stainless baseplate, Veeco 2000 l/s diffusion pump,
LN2 trap, single lever valve controlled pumping system,
Alcatel 2033, 27 cfm direct drive rough pump, 3 filament
sources, 2KVA SCR controlled filament supply, source
shutter, Kronos thickness monitor with head, cold cathode
gauge with dual TC's, simple substrate holder. |
|
$16,500.00 |
| |
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| Option 1 |
Convert
to CTI CT-8 cryo with SC compressor |
Add |
$4500.00 |
| Stk.# |
Description |
Photo |
Price |
| E007 |
VEECO
VE-747 10" Evaporator with the following equipment:
25.5" stainless bell jar air-cooled, hydraulic hoist,
26" stainless baseplate, Veeco 3000 l/s diffusion pump,
LN2 trap, pneumatic valving with auto-valve sequencer,
Alcatel 2063, 50 cfm direct drive rough pump, 2 filament
sources, 5KVA SCR controlled filament supply, source
shutter, Kronos thickness monitor
with head, RG-1000 ion
gauge with TG-70 TC gauge, simple substrate holder. |
|
$28,500.00 |
| |
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| Option 1 |
Convert
to CTI CT-10 cryo with 8500 compressor |
Add |
$8,500.00 |
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TFS Evaporators
- Ion Pumped
| Stk.# |
Description |
Photo |
Price |
| E010 |
18" by 30" pyrex bell jar with guard, counter-balanced
hoist, 20" stainless baseplate, 8" cff manual gate valve,
400 l/s ion pump, ion pump power supply, dual Varian
sorption pumps with manual rough valves, 2 filament
sources, 2KVA SCR controlled filament supply, source
shutter, Inficon thickness monitor with head, Varian 843
ion gauge with dual TC's, simple substrate holder. |
 |
$12,500.00 |
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TFS Evaporators
- Diffusion Pumped
| Stk.# |
Description |
Photo |
Price |
| E012 |
18" by 30" pyrex bell jar with guard, counter-balanced
hoist, 20" stainless baseplate, manual gate valve,
1500 l/s diffusion pump, LN2 trap, manual foreline and
rough valves, Welch 1397, 17.7 cfm vacuum pump,
2 filament sources, 2KVA variac controlled filament
supply, source shutter, Inficon thickness monitor with
head, Granville-Phillips 270 ion gauge with dual TC's,
simple substrate holder. |
 |
$12,500.00 |
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TFS Evaporators
- Turbo Pumped
| Stk.# |
Description |
Photo |
Price |
| E015 |
TFS
Tabletop Evaporator with the following:
12" by 18" pyrex bell jar with guard, manual hoist
14" stainless baseplate, Balzers 330, 330 l/s turbo,
TCP 300 turbo control with auto vent, Leybold D4B,
4.5cfm rough pump, separate from unit, 2 filament
sources, 1KVA variac controlled filament supply,
source shutter, Granville-Phillips 270 ion gauge
with dual TC's, simple substrate holder.
One button auto-pump to high vacuum.
|
 |
$15,500.00 |
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to Contents-
SEM Evaporators
| Stk.# |
Description |
Photo |
Price |
| E020 |
Denton
DV-502 with the following:
12" by 12" pyrex bell jar with guard, manual hoist
14" stainless baseplate, 4" diffusion pumped system,
LN2 trap, manual valving, 1 KVA filament supply, omni-
rotational stage, evaporation fixturing, carbon rod
fixturing, Alcatel 2008A, 7 cfm direct drive vacuum
pump. |
 |
$9,500.00 |
| |
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| Option 1 |
Convert
to CTI CT-100 cryo with SC compressor |
Add |
$4,500.00 |
CVC Evaporators
| Stk.# |
Description |
Photo |
Price |
| E030 |
CVC
PSM-66 with the following:
18" by 30" pyrex bell jar with guard, electric hoist
20" stainless baseplate, 6" PAS-66 goldline pumping
stack, BVN-100 LN2 trap, pneumatic valving, AVC-385
auto-valve sequencer Leybold D60A, 36.7 cfm direct
drive vacuum pump, 2 KVA filament supply with fixturing,
Inficon thickness monitor with head, simple substrate
holder, |
|
$15,000.00 |
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2002-2008 Content, Format, and Photos TFS Technologies, Inc. e-mail at
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