Vacuum Chamber Equipment with Ultra High Vacuum Fitting

Each vacuum chamber is cleaned and leak tested unless noted.

Every vacuum chamber cff vacuum fitting is guaranteed to seal.

Prices represent rebuilt vacuum chambers.  

Each vacuum chamber is refurbished unless quoted NEW.

TFS Technologies, Inc. -  800-795-7977

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Vacuum Chamber for Ultra High Vacuum applications                                                          

Stk# Description Photo Price
E22200
Ultra High Vacuum Chamber- Process Chamber
This high vacuum chamber is 14" ID by 24" high and of stainless steel.  The main flange is 18" diameter and wire sealed (Wheeler Flange).  It has 6-2.75" CFF ports in it.  The top flange extends up 13" with 8" pipe and a 10" CFF top flange.  A 6" pipe side port with a 8" CFF flange is teed off the 10" pipe.  There is also a 2.75" CFF port off the 10" pipe near the top.  The bottom of the chamber has a 8" CFF port.  Around the base of the chamber there is one 8" CFF port opposite a 6" CFF port, 4 ea opposing 2.75" CFF ports, 1 ea 2.75" CFF port, 1 ea 2.75" CFF tee port at an angle.  Above the lower ports are 2ea 4.5" CFF opposing ports, 3ea 2.75" CFF ports, 6ea 2.75" opposing ports.  Above these ports are 3ea 2.75" CFF angled ports and 3ea 2.75" CFF ports.

  
Vacuum chamber is sold clean and empty with port covers. Any feedthrus, adapters or gauges are not included in price. 

Click on photo at right for larger picture or here for complete picture package.

UHVChamber14by24Front.jpg (52556 bytes) $5850.00
E22205
Ultra High Vacuum Chamber-UHV Flanges 

Chamber as shown includes top flange.  Chamber is 10" ID by 11" high.  Top flange is 12" OD CFF, bottom flange is 13.25" CFF.  Two opposing 6" CFF ports, four opposing 2.75" CFF ports, 3 ea 1.33" CFF ports.

Chamber is electro-polished and sold as shown clean, dry, empty, leak-tight.

Click on photo at right for larger picture of vacuum chamber.

UHVChamber10by11.jpg (111255 bytes)

UHVChamber10by11A.jpg (122199 bytes)

$1650.00
E22210
Ultra High Vacuum Chamber - with Water-Jacket
Vacuum chamber is 6" OD (4.75" ID) by 12" high.  It has a full water jacket surrounding the main chamber. Water inlet and outlet fittings are 1/4" VCR. There are 8 ea 2.75" CFF opposing ports near the chamber top, and 4 ea 2.75" CFF opposing ports near the bottom.  Top and bottom flanges are 6" OD CFF.  All flanges are tapped.

 Sold clean, dry, and empty as shown. Vacuum chamber and cff flanges guaranteed to seal and be leak tight. 

Click on photo at right for larger picture of vacuum chamber.

UHVChamber6by12Frnt.jpg (105308 bytes)

UHVChamber6by12Rear.jpg (91908 bytes)

$600.00
E22215
Ultra High Vacuum Chamber
This stainless UHV vacuum chamber is 8" OD by 19" long.  Top flange is 8" CFF with tapped holes, bottom of chamber is blanked. Two lower 8" CFF ports are at right angles.  Two 2.75" CFF ports oppose each of the 8" CFF ports.  A 4.5" CFF port is located between a 2.75" CFF and an 8" CFF port and faces at an upward angle.

Vacuum chamber is sold clean with bead-blasted exterio, guaranteed leak tight with sealable cff flange surfaces.  No port covers included in price.

Click on photo at right for larger picture of vacuum chamber. 

UHVChamber8by19Frnt.jpg (57352 bytes)

UHVChamber8by19Rear.jpg (86184 bytes)

$450.00
E22220
Ultra High Vacuum Chamber
This stainless vacuum chamber is 20" high, 12" OD pipe, 14" cff flange at top, 14" wheeler flange on bottom.  The vacuum chamber has 4ea 8" cff ports 90 degrees apart with centers 8" from face of bottom flange, the extended port is 7.5" long.  The vacuum chamber has 4ea 2.75" ports 90 degrees apart located between the 8" ports.  Center of these ports is 9" from face of bottom flange.  One port is 3.5" long. There are 3ea 2.75" cff ports at 90 degrees apart centered at 4.25" from top flange face, and located above the lower 2.75" ports.  The 4th position has a 4.5" cff port also 4.25" from top flange face and is 4.00" long.  The vacuum chamber has 4ea 2.75" cff angled ports at 90 degrees apart.  These ports are angled such that they point to the center intersection of the four 8" ports.  These ports are located directly above each 8" port.  We can cut the wheeler flange off and replace it with a 14" cff flange for an additional $600.00.  We can also shorten the 8" extended port for an additional charge.  The chamber has some surface scratches, but we guarantee all cff flanges to seal.

Vacuum chamber guaranteed leak tight.

Vacuum chamber is sold clean and empty with no port covers.

Click on photo at right for larger picture of vacuum chamber.

UHVChamber1Rt.jpg (45449 bytes) $1900.00

Ultra High Vacuum Chamber
This stainless vacuum chamber is 6" ID by 16" high.  It has a 6" CFF port and a 4.5" CFF port.  It has water-cooling lines with insulation.  A thermister is applied for surface temperature measurement.

Vacuum chamber guaranteed leak tight.

Vacuum chamber is sold clean and empty with no port covers.

Click on photo at right for larger picture of vacuum chamber.

UHVChamber6by16.jpg (53793 bytes)

UHVChamber6by16B.jpg (54979 bytes)

$375.00
E22230
Ultra High Vacuum Chamber
This stainless vacuum chamber is 6" ID by 11" high.  It is a custom tee with 6" pipe and two 8" CFF flanges.  Both side ports are 6" CFF flanges.

Vacuum chamber guaranteed leak tight.

Vacuum chamber is sold clean and empty with no port covers.

Click on photo at right for larger picture of vacuum chamber.

UHVChamber6by11.jpg (34087 bytes) $400.00
E22235
Ultra High Vacuum Chamber
This stainless vacuum chamber is 6" ID by 10" high.  It is set up for vacuum or pressure.  It has two Nupro 1/4" VCR shutoff valves.

Vacuum chamber guaranteed leak tight.

Vacuum chamber is sold clean and empty with no port covers.

Click on photo at right for larger picture of vacuum chamber.

UHVChamberPress6by10.jpg (54612 bytes)

UHVChamberPress6by10A.jpg (41236 bytes)

$375.00
E22240
Ultra High Vacuum Chamber
This stainless vacuum chamber is 3" ID by 5" high.  It has a 6" CFF bottom flange and a 4.5" CFF top flange.  It has a single high voltage feedthru along with two bnc electrical feedthrus.  there are also three 1/4" VCR gas ports.

Vacuum chamber guaranteed leak tight.

Vacuum chamber is sold clean and empty with no port covers.

Click on photo at right for larger picture of vacuum chamber.

UHVChamber3by5.jpg (28782 bytes)

UHVChamber3by5A.jpg (32726 bytes)

UHVChamber3by5B.jpg (43069 bytes)

$215.00
E22245
Ultra High Vacuum Chamber
This stainless vacuum chamber is a 10" CFF 6 way cross.  The side ports are 13" flange to flange.  Top and bottom ports are 14.5" flange to flange.

Vacuum chamber guaranteed leak tight.

Vacuum chamber is sold clean and empty with no port covers.  Aluminum mount available for an extra $150.00.

Click on photo at right for larger picture of vacuum chamber.

CFF6way10InchCross.jpg (152898 bytes)

$2450.00
E22250
 

 

 

E22255
 

 

 

E22260
 

 

 

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Vacuum Chamber for Ultra High Vacuum applications - Multi Port CFF Fittings                                                                                                                        

Stk# Description Photo Price
E22300 This vacuum chamber is a standard 10" cff 6-way cross that is    $2500.00 BP
E22310 24" Deep by 22" Wide by 23.5" High, Full opening door
one or two sides.  Multiple cff ports, and an ISO pump port. Doors have windows.  All stainless construction.
22by24cham1.jpg (26487 bytes)

22by24cham2.jpg (22578 bytes)

$8500.00 BP
E22315 22" Deep by 21.5" Wide by 23.5" High, Full opening door
one or two sides.  Multiple cff ports, and an ISO pump port. Doors have windows.  All stainless construction.
  $7500.00 BP
E22320 12" Deep by 16" Wide by 23.5" High, Full opening door
one side.  Multiple cff ports, and an ISO pump port. Door and sides have windows.  All stainless construction.
  $3500.00 BP
E22350 Stainless Process Chamber - Approx 45" Wide by 55" High, 11.5 feet long, full opening slide away doors at each end, vertical load lock port on side, multiple pump ports and feedthru ports, electro-polished stainless thermal jacket on exterior.   $0.00

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Stainless Vacuum Chambers                                                                     

Stk# Description Photo Price
E22400 24" ID by 30" Deep horizontal chamber with full opening door one end.  Viewport in door, 6" ASA pumping port.  Single 6" cff side ports.  We can add ports as required.
Electrop-olished chamber.
24by30cham.jpg (23192 bytes) $0.00 BP
E22420 Vertical Stainless Chamber, 36" ID by 48" deep, full opening lid, multiple ports.  Can be setup horizontal for an additional charge. 36by48cham.jpg (32500 bytes) 36by48cham1.jpg (38740 bytes) $0.00 BP

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Aluminum Vacuum Boxes   

Stk# Description Photo Price
E22500 12" Wide by 12" High by 20" deep, full opening door one end
1.5" ASA zero length pump port at rear.  Shelf brackets inside. No viewport, but we can add it for an additional charge.
  $650.00 BP
E22505 12" Wide by 14" High by 20" deep, full opening door one end
1.5" ASA extended length pump port at rear.  Shelf brackets inside. No viewport, but we can add it for an additional charge.
12by14alumbox.jpg (23686 bytes) 12by14alumbox1.jpg (16015 bytes) $0.00 BP

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Aluminum Vacuum Chambers

Stk# Description Photo Price
E22600 10" Diameter, 7" Deep, with full opening lid, Front viewport, baseplate   $350.00

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