Mass Flow Meters, Thermal Mass Flow Meters

TFS Technologies, Inc. -  800-795-7977

Prices represent rebuilt and calibrated mass flow meters.

Thermal mass flow meters are refurbished unless quoted NEW.

Mass flow meters can be recalibrated for different gases for an additional charge.

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Tylan Mass Flow Meters                                                                   

Stk# Model Range Seal Mat Gas Type Photo Price
E35000 2900M 100 sccm Metal Argon MFCTylan2900M.jpg (16401 bytes) $425.00
E35005 2900M 100 sccm Metal Oxygen   $425.00
E35010 2900M 100 sccm Metal Helium   $425.00
E35015 2900M 300 sccm Metal Helium   $425.00
E35020 2900M 100 sccm Metal SF6   $425.00
E35025 2900M 200 sccm Metal SF6   $425.00
E35030 2900M 500 sccm Metal SF6   $425.00
E35035 2900M 100 sccm Metal CF4   $425.00
E35040 2900M 300 sccm Metal CF4   $425.00
E35045 2900M 20 sccm Metal CHF3   $425.00
E35050 2900M 100 sccm Metal SiH2Cl2   $425.00
E35055 2900V 750 sccm O-Ring Argon   $300.00
E35060 2900V  200 sccm O-Ring HBr   $300.00
E35065 2900V  500 sccm O-Ring Cl2   $300.00
E35070 2900V  5 sccm O-Ring Oxygen   $300.00
E35075 2900V 50 sccm O-Ring 10% O2,90% He   $300.00

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Unit Thermal Mass Flow Meters                                                 

Stk# Model Range Seal Mat Gas Type Photo Price
E35200 UFC1100A 1 SLM O-Ring Nitrogen MFCUFC1100.jpg (19378 bytes) $250.00
E35205 UFC1100A 1 SLM O-Ring Helium   $250.00
E35210 UFC1100A 1 SLM O-Ring CCl3F   $250.00
E35215 UFC1100A 20 SLM O-Ring Nitrogen   $250.00
E35220 UFC1100A 500 sccm O-Ring Nitrogen   $250.00
E35225 UFC1200A 3 SLM O-Ring Nitrogen   $250.00
E35250 UFC1500A 200 sccm O-Ring C2F6   $300.00
E35285 UFC1020A 5000 sccm O-Ring Nitrogen   $250.00
E35290 UFC1020A 10 SLM O-Ring Nitrogen   $250.00
E35295 UFC1660 100 sccm Metal Nitrogen   $400.00
E35300 UFC1660 3 SLM Metal Nitrogen   $400.00

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MKS Thermal Mass Flow Meters                                                 

Stk# Model Range Seal Mat Gas Type Photo Price
E35400 2259B-00200RV 200 sccm O-Ring Nitrogen MFCMKS1259.jpg (18507 bytes) $450.00
E35405 2258B-00200RV 200 sccm O-Ring Nitrogen   $450.00
E35410 1259-V-100-R 100 sccm O-Ring     $350.00
E35415            

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Mass Flow Meter Controls                                                        

Stk# Mfg. Model Type Condition Photo Price
E35500 MKS 246 Digital   MKS246cntrl.jpg (8504 bytes) $400.00
E35505            
E35510            
E35515 Tylan 80-4        
E35520 Tylan 80-6        
E35525            

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