TFS Technologies, Inc. - 800-795-7977
Prices represent rebuilt diffusion pumps.
Used Varian diffusion pumps are available for less.
Vacuum diffusion pumped systems and other small vacuum pumps are in stock.
Varian Diffusion Pumps
| Stk.# | Model | Inlet Flng | L/S | Voltage | Watts | Photo | Price |
| E5400 | HSA | 2" ASA | 150 | 115/230 | 350 | $600.00 | |
| E5405 | M2 | 2" ASA | 175 | 115/230 | 450 | $600.00 | |
| E5410 | HS2 | 2" ASA | 285 | 115/230 | 450 | $600.00 | |
| E5415 | M4 | 4" ASA | 800 | 115/230 | 1190 | $900.00 | |
| E5420 | VHS-4 | 4" ASA | 1200 | 115/230 | 1450 | $1100.00 | |
| E5425 | M6 | 6" ASA | 1500 | 115/230 | 1785 | $1200.00 | |
| E5430 | VHS-6 | 6" ASA | 2400 | 115/230 | 2200 | $1500.00 | |
| E5435 | VHS-250 | ISO 250 | 3700 | 115/230 | 2200 | $1500.00 | |
| E5440 | HS-10 | 10" ASA | 4000 | 208/230 | $3000.00 | ||
| E5445 | VHS-10 | 10" ASA | 5300 | 208/230/460 | 4400 | $5300.00 | |
| E5450 | VHS-400 | ISO 400 | 8000 | 208/230/460 | 4400 | $5000.00 | |
| E5455 | HS-16 | 16" ASA | 10000 | 208/230/460 | 8100 | $ | |
| E5460 | HS-20 | 20" ASA | 17500 | 208/230/460 | 12000 | $ | |
| E5465 | HS-32 | 32" ASA | 32000 | 208/230/460 | 24000 | $9500.00 | |
| E5470 | HS-35 | 35" ASA | 50000 | 208/230/460 | 24000 | $ |
Vacuum chambers and baseplates are in stock.
We have rotary vane vacuum pumps available also.
Edwards Diffusion Pumps/Diffstaks
| Stk.# | Model | Inlet Flng | L/S | Voltage | Watts | Photo | Price |
| E5500 | 100/300C | ISO 100 | 322 | 115/230 | 650 | $700.00 | |
| E5505 | 160/700C | ISO 160 | 865 | 115/230 | 1350 | $1000.00 | |
| E5510 | 250/2000C | ISO 250 | 2300 | 230 | 2250 | $1600.00 | |
| E5515 | CR100/300 | ISO 100 | 265 | 115/230 | 650 | $2100.00 | |
| E5520 |
All our diffusion pumps are repainted, fully tested and warranted when purchased rebuilt.
Other mechanical pumps and pre owned vacuum pumps are available.
CVC Diffusion Pumps
| Stk.# | Model | Inlet Flng | L/S | Voltage | Watts | Photo | Price |
| E5600 | PMC-4 | 4" ASA | 720 | 115/230 | $500.00 | ||
| E5605 | PMC-6 | 6" ASA | 1400 | 115/230 | $700.00 | ||
| E5610 | PVMS-6 | ISO 250 | 2500 | 115/230 | $1100.00 | ||
| E5615 | PMC-10 | 10" ASA | 230/460 | $1600.00 | |||
| E5620 | PVMS-1000 | 10"ASA | 5300 | 230/460 | $3500.00 | ||
| E5625 | PMC-20 | 20" ASA | 18000 | 230/460 | $6500.00 |
We have a huge inventory of vacuum parts in stock. Vacuum chambers, vacuum valves,
vacuum gauges, and other used vacuum equipment.
Veeco Diffusion Pumps
| Stk.# | Model | Inlet Flng | L/S | Voltage | Watts | Photo | Price |
| E5700 | EP-775 | 6" ASA | 2000 | 115/230 | $950.00 |
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2007 Content, Format, and Photos TFS Technologies, Inc. e-mail at sales@tfstechnologies.com
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